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Proceedings Paper

Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer
Author(s): HyeonOk Gil; Sunglim Park; Jaewha Jung; Dae gab Gweon
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Paper Abstract

12 In manufacturing a rotating-analyzer ellipsometer, error sources and calibration methods are discussed. It is important to get rid of external noise for measurement of high thickness resolution and accurate optical constant and this means that the precision of system above all is important to develop the ellipsometer. Therefore the precision design and error calibration of the optical components in ellipsometer are inevitable. We propose a PSA (polarizer-specimen-analyzer) system to manufacture a rotating-analyzer ellipsometer.

Paper Details

Date Published: 12 February 2001
PDF: 10 pages
Proc. SPIE 4190, Optomechatronic Systems, (12 February 2001); doi: 10.1117/12.417215
Show Author Affiliations
HyeonOk Gil, Korea Advanced Institute of Science and Technology (South Korea)
Sunglim Park, Korea Advanced Institute of Science and Technology (South Korea)
Jaewha Jung, Korea Advanced Institute of Science and Technology (South Korea)
Dae gab Gweon, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4190:
Optomechatronic Systems
Hyungsuck Cho; George K. Knopf, Editor(s)

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