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Proceedings Paper

Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout
Author(s): Spyros Kavadias; Piet De Moor; Martin Gastal; Niki Hendrikx; Filip Wirix; Chris A. Van Hoof
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Paper Abstract

12 An IR sensor based on a linear array of poly Si-Ge bolometers is presented. The bolometers are surface micromachined devices employing a suspended structure to achieve thermal insulation from the substrate. Linear arrays of 64 elements have been connected to the readout chip by means of a ceramic substrate realizing a hybrid sensor. The CMOS readout chip provides a pulsed bias for the bolometers, amplification of the signal and multiplexes the output in an analog line. At room temperature an NETD of 300mK has been achieved, while the maximum readout speed is 1kHz.

Paper Details

Date Published: 9 February 2001
PDF: 8 pages
Proc. SPIE 4169, Sensors, Systems, and Next-Generation Satellites IV, (9 February 2001); doi: 10.1117/12.417122
Show Author Affiliations
Spyros Kavadias, IMEC (Belgium)
Piet De Moor, IMEC (Belgium)
Martin Gastal, IMEC (Belgium)
Niki Hendrikx, Group T Technologische Hogeschool Leuven (Belgium)
Filip Wirix, Group T Technologische Hogeschool Leuven (Belgium)
Chris A. Van Hoof, IMEC (Belgium)


Published in SPIE Proceedings Vol. 4169:
Sensors, Systems, and Next-Generation Satellites IV
Hiroyuki Fujisada; Joan B. Lurie; Alexander Ropertz; Konradin Weber, Editor(s)

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