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Proceedings Paper

Novel micromachined sensor head for optical data storage applications
Author(s): Christophe Mihalcea; M. Kuwahara; Junji Tominaga; Nobufumi Atoda
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Paper Abstract

We report on a novel micromachined sensor head for optical data storage devices. The head is based on a 6 X 6 aperture array with subwavelength dimensions. In comparison to previously introduced flat-aperture heads, a tip-based array is presented which profits from a recently presented reliable fabrication process of apertures in the 100 nm regime and below. This fabrication process exploits inhomogeneous thickness distributions and modified etching rates of thermally generated siliconoxides on <001>-oriented silicon wafers at relatively low temperatures, and makes it possible to open apertures with dimensions below 150 nm in hollow SiO2 pyramidal shaped tips. A metallization process is finally used to provide optical opacity and to further reduce the overall aperture dimensions to less than 100 nm. The fabrication process of these sensors is described in detail and the results are confirmed by SEM photographs.

Paper Details

Date Published: 7 February 2001
PDF: 4 pages
Proc. SPIE 4085, Fifth International Symposium on Optical Storage (ISOS 2000), (7 February 2001); doi: 10.1117/12.416870
Show Author Affiliations
Christophe Mihalcea, National Institute for Advanced Interdisciplinary Research (Japan)
M. Kuwahara, National Institute for Advanced Interdisciplinary Research (Japan)
Junji Tominaga, National Institute for Advanced Interdisciplinary Research (Japan)
Nobufumi Atoda, National Institute for Advanced Interdisciplinary Research (Japan)


Published in SPIE Proceedings Vol. 4085:
Fifth International Symposium on Optical Storage (ISOS 2000)

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