Share Email Print
cover

Proceedings Paper

Testing system for groove geometry of CD-R substrates
Author(s): Wendong Xu; Fuxi Gan; Hongren Shi; Hong He; Qiang Lin; Jielin Sun; Xishan Li
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We introduce a homemade testing system for groove geometry of CD-R substrates by measuring diffraction orders. This testing is of particular importance in CD-R disc manufacture process because the results fed back from the testing can be used to help optimizing recording, developing, metalizing, electroplating and replicating processes. Even if the width and depth of groove are not accurately obtained by this system, it is also valuable in CD-R disc manufacturing process because the system is simple, sensitive, quick and non- destructive, and can be well-used to judge the quality of substrates. The results of the same sample tested by our system and an AFM microscope are presented.

Paper Details

Date Published: 7 February 2001
PDF: 4 pages
Proc. SPIE 4085, Fifth International Symposium on Optical Storage (ISOS 2000), (7 February 2001); doi: 10.1117/12.416854
Show Author Affiliations
Wendong Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics (China)
Hongren Shi, Shanghai Institute of Optics and Fine Mechanics (China)
Hong He, Shanghai Institute of Optics and Fine Mechanics (China)
Qiang Lin, Shanghai Institute of Optics and Fine Mechanics (China)
Jielin Sun, Shanghai Institute of Optics and Fine Mechanics (China)
Xishan Li, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4085:
Fifth International Symposium on Optical Storage (ISOS 2000)
Fuxi Gan; Lisong Hou, Editor(s)

© SPIE. Terms of Use
Back to Top