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Proceedings Paper

Prospects for high-power high-repetition-rate industrial excimer lasers
Author(s): Vladimir M. Borisov; Oleg B. Khristoforov; Yurii B. Kirykhin; Aleksandr Yu. Vinokhodov; Andrei I. Demin; V. A. Vodchits; A. Eltzov
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Paper Abstract

Recent progress in excirner laser technology developed at TRINITI is reported. The key of the technologT is a combination of simple reliable UV preionizer based on creeping discharge on surface of a sapphire plate and the compact highly efficient gas flow system. This technology allows to develop very compact, high power, high repetition rate models of excimer lasers capable to deliver stabilized average power up to 500W (XeC1, KrF), 250W (ArF) and realise pulse repetition rate of more then 5 kHz..

Paper Details

Date Published: 25 January 2001
PDF: 5 pages
Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); doi: 10.1117/12.414086
Show Author Affiliations
Vladimir M. Borisov, Troitsk Institute for Innovation and Fusion Research (Russia)
Oleg B. Khristoforov, Troitsk Institute for Innovation and Fusion Research (Russia)
Yurii B. Kirykhin, Troitsk Institute for Innovation and Fusion Research (Russia)
Aleksandr Yu. Vinokhodov, Troitsk Institute for Innovation and Fusion Research (Russia)
Andrei I. Demin, Troitsk Institute for Innovation and Fusion Research (Russia)
V. A. Vodchits, Troitsk Institute for Innovation and Fusion Research (Russia)
A. Eltzov, Troitsk Institute for Innovation and Fusion Research (Russia)


Published in SPIE Proceedings Vol. 4184:
XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference

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