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Proceedings Paper

High-repetition-rate 157-nm mini excimer lasers
Author(s): Andreas Goertler; Claus Strowitzki; Stephan Geiger
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Paper Abstract

For new industrial applications, mini excimer lasers with a wavelength of 157 nm were developed. The main goal was to extend the component lifetime. The laser tube is designed in metal-ceramic technology. An erosion-free corona preionization is installed. The pulsed-power module contains a solid state switch with additional compression stages to generate the high current rise at the electrodes of the laser tube. All of the modules in the laser system are designed for long lifetime. At 157 nm the mini excimer laser reaches a maximum single-pulse energy of 2 mJ up to a repetition rate of 1000 Hz. An overview of the results of long-term testing of these stateÑofÑtheÑart mini excimer lasers at 157 nm will be given.

Paper Details

Date Published: 25 January 2001
PDF: 4 pages
Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); doi: 10.1117/12.414083
Show Author Affiliations
Andreas Goertler, TuiLaser AG (Germany)
Claus Strowitzki, TuiLaser AG (Germany)
Stephan Geiger, TuiLaser AG (Germany)


Published in SPIE Proceedings Vol. 4184:
XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Antonio Lapucci; Marco Ciofini, Editor(s)

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