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Proceedings Paper

Ablation of BN ceramics by femtosecond and picosecond laser pulses
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Paper Abstract

Ablation of cubic-boron nitride (c-BN) and hexagonal-boron nitride (h-BN) ceramics irradiated with Ti:sapphire laser (110fs) and Nd:YAG laser (100ps) pulses is studied. The relationship between ablation rate and laser fluence for the Nd:YAG laser shows a semi-logarithmic formula for c-BN and h-BN, and also the ablation rate of h-BN by Ti:sapphire laser is observed similar to that by the Nd:YAG laser, except that of c-BN. It is found that there are two different regimes of ablation rate for c-BN as same as metals by Ti:sapphire laser ablation. In addition, it is found from XPS analysis and SEM observation that the area ablated with Ti:sapphire laser shows the BN surface unchanged and has no evidence of melting. These results are different from the ablated surface with the Nd:YAG laser. In short, the microscopic processing of BN ceramics using femtosecond Ti:sapphire laser shows little heat effect and keeps the chemical composition of the ablated surface unchanged.

Paper Details

Date Published: 25 January 2001
PDF: 4 pages
Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); doi: 10.1117/12.414006
Show Author Affiliations
Yoichi Hirayama, Keio Univ. (Japan)
Minoru Obara, Keio Univ. (Japan)

Published in SPIE Proceedings Vol. 4184:
XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference
Antonio Lapucci; Marco Ciofini, Editor(s)

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