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Proceedings Paper

Structural peculiarities of metal alloy and multilayer films synthesized from laser erosion plasma
Author(s): Andre A. Gorbunov; A. Tselev; A. Levin; Axel Mensch; D. C. Meyer; J. Noetzel; F. Prokert; W. Pompe
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Paper Abstract

Results of experimental investigations and numerical simulations of thin films and multilayers of Fe-Al and Co-Cu binary systems synthesized by PLD are presented. The influence of specific features of PLF on the structure of thin metal and alloy films is discussed. Examples of non- conventional microstructure formation are given.

Paper Details

Date Published: 30 January 2001
PDF: 6 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413765
Show Author Affiliations
Andre A. Gorbunov, Technische Univ. Dresden (Germany)
A. Tselev, Technische Univ. Dresden (Germany)
A. Levin, Technische Univ. Dresden (Germany)
Axel Mensch, Technische Univ. Dresden (Germany)
D. C. Meyer, Technische Univ. Dresden (Germany)
J. Noetzel, Forschungszentrum Rossendorf (Germany)
F. Prokert, Forschungszentrum Rossendorf (Germany)
W. Pompe, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000
Vadim P. Veiko, Editor(s)

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