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Proceedings Paper

Laser-induced liquid phase deposition (LCLD): state of the art
Author(s): Laszlo Nanai; Krisztian Kordas; Katalin Bali
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Paper Abstract

12 A review of results of a last few years investigation in the field of laser light induced liquid phase metal deposition on different substrates is presented. The role of liquid phase chemical deposition techniques represents a certain interest for contemporary micro technology because of its technical and economical advantages compared to other technics e.g. chemical vapor phase deposition. The methods do not require harmful precursors, complicated vacuum tools, and it is cost effective.

Paper Details

Date Published: 30 January 2001
PDF: 21 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413763
Show Author Affiliations
Laszlo Nanai, Univ. of Szeged (Hungary)
Krisztian Kordas, Univ. of Szeged (Hungary)
Katalin Bali, Univ. of Szeged (Hungary)

Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000
Vadim P. Veiko, Editor(s)

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