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Proceedings Paper

Low-frequency noncontact photothermal measurements of metal film thickness on a dielectric surface
Author(s): A. V. Reznikov
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Paper Abstract

It is shown that for integrating control of thickness of uniform metal films along surface samples it is possible to use low frequencies of modulation of heating radiation and relatively large sizes of laser beams, that permits to simplify registration, to reduce the requirements to accuracy of optical adjustment and to simplify mechanical stabilization of all installation to vibrations.

Paper Details

Date Published: 30 January 2001
PDF: 4 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413760
Show Author Affiliations
A. V. Reznikov, Laser-Compact Co. Ltd. (Russia)

Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000
Vadim P. Veiko, Editor(s)

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