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Proceedings Paper

Laser microprocessing and its applications in the microelectronics industry
Author(s): Yongfeng Lu; ZhongMin Ren
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Paper Abstract

Laser micro processing technology has been applied to industries in a number of aspects: (1) laser cleaning, laser deflash and plasma-assisted laser micro processing, (2) laser texturing, laser bumping and related technologies, (3) real-time monitoring of laser surface processing, (4) laser- induced controllable periodic structures and (5) laser nano- etching and nano lithography by tip-enhanced laser irradiation.

Paper Details

Date Published: 30 January 2001
PDF: 9 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413755
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (Singapore)
ZhongMin Ren, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000

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