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Proceedings Paper

Overview of novel approaches for laser microfabrication of advanced materials
Author(s): Koji Sugioka
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Paper Abstract

Laser processing is quite attractive for micromachining, microstructuring, and modification of materials. Conventional laser processing using IR, visible, or UV lasers, however, cannot realize precision microfabrication of advanced materials such as fused silica, quartz, sapphire, diamond, SiC, GaN, etc. Novel laser processing is recent topics for microprocessing of these materials. In this paper, such novel approaches are reviewed.

Paper Details

Date Published: 30 January 2001
PDF: 9 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413749
Show Author Affiliations
Koji Sugioka, RIKEN--The Institute of Physical and Chemical Research (Japan)

Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000
Vadim P. Veiko, Editor(s)

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