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Proceedings Paper

Microfabrication using laser-induced photopolymerization
Author(s): Katsumi Yamaguchi; Takeshi Nakamoto
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Paper Abstract

This paper deals with the development of simple and practical methods for fabrication of micro parts using laser induced photopolymerization. Mask pattern transfer method is used for high aspect ratio parts. Focused laser beam writing method is used for both high aspect ratio parts and 3D parts. The accuracy of the solidified polymer when using these methods is examined. Various shapes of micro polymer structures are produced using these methods.

Paper Details

Date Published: 30 January 2001
PDF: 8 pages
Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); doi: 10.1117/12.413747
Show Author Affiliations
Katsumi Yamaguchi, Nagoya Univ. (Japan)
Takeshi Nakamoto, Nagoya Univ. (Japan)


Published in SPIE Proceedings Vol. 4157:
Laser-Assisted Microtechnology 2000
Vadim P. Veiko, Editor(s)

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