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Proceedings Paper

Optimization of depth-graded multilayer designs for EUV and x-ray optics
Author(s): Zhanshan Wang; Alan G. Michette
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Paper Abstract

The optimization of the design of depth-graded multilayers with special angular or wavelength responses for use as coatings in EUV/X-ray optics is discussed in this presentation. The optimization is based on the well-known Fresnel equations and recursive calculation combined with a defined merit function, with random variation of the thickness of each layer. The optimization of depth-graded multilayers for various applications uses a process that judges a design based on its required performance in a given range of wavelength and/or incidence angle. The requirements could include many factors such as the spectral distribution of a source, the shape of the reflectivity curve or the geometry of the optical system. The key factor for optimization is to determine a suitable merit function for a specific application. This allows the design of multilayers for different requirements. The method has been used to give the thickness of each layer in some depth-graded multilayers with special requirements in optical properties.

Paper Details

Date Published: 5 January 2001
PDF: 11 pages
Proc. SPIE 4145, Advances in X-Ray Optics, (5 January 2001); doi: 10.1117/12.411644
Show Author Affiliations
Zhanshan Wang, Changchun Institute of Optics and Fine Mechanics and King's College London (China)
Alan G. Michette, King's College London (United Kingdom)

Published in SPIE Proceedings Vol. 4145:
Advances in X-Ray Optics
Alan G. Michette; Andreas K. Freund; Tetsuya Ishikawa; Sebastian Oestreich; Derrick C. Mancini; Ali M. Khounsary; Derrick C. Mancini; Alan G. Michette; Sebastian Oestreich, Editor(s)

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