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Proceedings Paper

Efficient automated tapeout system
Author(s): William A. Krieger; Chana Nasamran
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Paper Abstract

A tapeout system has been developed for a production environment that is extremely high quality and executes quickly for good cycle time performance. The system automatically performs each step of the tapeout task from layer generation on the front-end to final paperwork generation on the back-end. It was designed to reduce human interaction to a minimal level and to be fast, flexible, and easy to use. Several custom GUI windows provide the means of performing data entry and PERL programs link sequential software tasks together. For special needs, any of the individual steps in the tapeout flow can be interrupted and the defaults can be overwritten. Testchips are managed well with the system and show the greatest cycle time benefit ofthe automation. The tapeout system developed at Conexant and described here represents the culmination of nearly one full year of development work plus another two years of subsequent improvements. It has been in full production use at two different sites for more than two years.

Paper Details

Date Published: 22 January 2001
PDF: 8 pages
Proc. SPIE 4186, 20th Annual BACUS Symposium on Photomask Technology, (22 January 2001); doi: 10.1117/12.410687
Show Author Affiliations
William A. Krieger, Conexant Systems, Inc. (United States)
Chana Nasamran, Conexant Systems, Inc. (United States)

Published in SPIE Proceedings Vol. 4186:
20th Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Giang T. Dao, Editor(s)

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