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Proceedings Paper

CCD backside coatings optimized for 200- to 300-nm observations
Author(s): Michael P. Lesser
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Paper Abstract

The high QE and large variety of formats make modern back illuminated Charge-coupled devices (CCDs) nearly ideal detectors for most scientific imaging applications. In the ultraviolet (UV), however, quantum efficiency (QE) instability with temperature and with environmental conditions has limited their widespread use, especially for space applications. We have developed several techniques to achieve stable and high QE in the 200 - 300 nm wavelength range with back illuminated CCDs fabricated by various manufacturers. In this paper we report peak QE of over 90% at 240 nm (uncorrected from quantum yield). We describe a series of tests which demonstrate stability of these devices with temperature, humidity, and UV illumination. These results are all based in the chemisorption backside coating processes developed at the Steward Observatory CCD Laboratory.

Paper Details

Date Published: 18 December 2000
PDF: 8 pages
Proc. SPIE 4139, Instrumentation for UV/EUV Astronomy and Solar Missions, (18 December 2000); doi: 10.1117/12.410521
Show Author Affiliations
Michael P. Lesser, Steward Observatory/Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 4139:
Instrumentation for UV/EUV Astronomy and Solar Missions
Silvano Fineschi; Clarence M. Korendyke; Oswald H. W. Siegmund; Bruce E. Woodgate, Editor(s)

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