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Proceedings Paper

Planarization process of BPSG: capillary vs. centrifugal/gravitational forces
Author(s): Baw-Ching Perng; Kung Linliu
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Paper Abstract

Film planarization process, of importance in semiconductor IC manufacturing, results from mutual competition between three forces: capillary, viscous, and gravitation. In this communication we compare, using simple geometric arguments, the order of magnitudes between the capillary force and a generalized centrifugal/gravitational force acting perpendicular to the surface. For patterns of sub-micron dimension and conditions similar to BPSG reflow and photo-resist coating we found that, within instrumental accessibility, the centrifugal term is much smaller than the capillary term. We conclude that the centrifugal/gravitational forces affect global patterns, i.e., with dimension larger than 1000 micrometers , while the capillary force dominates the sub-micro leveling process.

Paper Details

Date Published: 23 August 2000
PDF: 7 pages
Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); doi: 10.1117/12.410090
Show Author Affiliations
Baw-Ching Perng, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Kung Linliu, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 4182:
Process Control and Diagnostics
Michael L. Miller; Kaihan A. Ashtiani, Editor(s)

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