Share Email Print

Proceedings Paper

Planarization process of BPSG: capillary vs. centrifugal/gravitational forces
Author(s): Baw-Ching Perng; Kung Linliu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Film planarization process, of importance in semiconductor IC manufacturing, results from mutual competition between three forces: capillary, viscous, and gravitation. In this communication we compare, using simple geometric arguments, the order of magnitudes between the capillary force and a generalized centrifugal/gravitational force acting perpendicular to the surface. For patterns of sub-micron dimension and conditions similar to BPSG reflow and photo-resist coating we found that, within instrumental accessibility, the centrifugal term is much smaller than the capillary term. We conclude that the centrifugal/gravitational forces affect global patterns, i.e., with dimension larger than 1000 micrometers , while the capillary force dominates the sub-micro leveling process.

Paper Details

Date Published: 23 August 2000
PDF: 7 pages
Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); doi: 10.1117/12.410090
Show Author Affiliations
Baw-Ching Perng, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Kung Linliu, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)

Published in SPIE Proceedings Vol. 4182:
Process Control and Diagnostics
Michael L. Miller; Kaihan A. Ashtiani, Editor(s)

© SPIE. Terms of Use
Back to Top