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Proceedings Paper

Raman spectroscopy: a multifunctional analysis tool for microelectronics manufacturing
Author(s): Lynette K. Ballast; Tim Z. Hossain; Alan Campion
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Paper Abstract

We have established several applications for the use of Raman spectroscopy in the microelectronics-manufacturing environment. The two primary applications are 1) monitoring thin films and 2) analyzing contaminants. Thin film applications include monitoring cobalt silicide phase transformation and thickness, and crystallinity changes in polysilicon. The same instrument has been used to collect fingerprint Raman spectra of contaminants that can be identified by matching to library or bulk materials spectra.

Paper Details

Date Published: 23 August 2000
PDF: 10 pages
Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); doi: 10.1117/12.410082
Show Author Affiliations
Lynette K. Ballast, Advanced Micro Devices, Inc. (United States)
Tim Z. Hossain, Advanced Micro Devices, Inc. (United States)
Alan Campion, Univ. of Texas at Austin (United States)

Published in SPIE Proceedings Vol. 4182:
Process Control and Diagnostics
Michael L. Miller; Kaihan A. Ashtiani, Editor(s)

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