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Proceedings Paper

Optical readout of uncooled thermal detectors
Author(s): Panos G. Datskos; Slobodan Rajic; Larry R. Senesac; Dennis Duncan Earl; Boyd M. Evans; James L. Corbeil; Irene Datskou
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Paper Abstract

We investigated microposition sensing of micro-electro- mechanical systems (MEMS) that is based on optical readout techniques. We determined the parameters that affect or limit the performance of optical readout techniques especially as they apply to detection of infrared radiation. Such microposition sensing schemes are very important as readout mechanisms for large arrays of microstructures which are required for imaging. In addition, we explored the performance of uncooled micromechanical IR sensors using Fresnel zone plates (FZP). This type of diffractive feature diffracts along the optical axis and not perpendicular to that axis. We found that temperature fluctuation noise and background fluctuation noise, are currently the limits to the performance of uncooled micromechanical IR detectors. The noise at the output of the optical readout includes amplified noise from the micromechanical structures and noise added by the optical readout itself. However, the added noise is negligible compared to the amplified temperature fluctuation noise inherent in the microstructures. In this context an optical readout is nearly an ideal, noiseless readout method.

Paper Details

Date Published: 15 December 2000
PDF: 13 pages
Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); doi: 10.1117/12.409842
Show Author Affiliations
Panos G. Datskos, Oak Ridge National Lab. and Univ. of Tennessee/Knoxville (United States)
Slobodan Rajic, Oak Ridge National Lab. (United States)
Larry R. Senesac, Univ. of Tennessee/Knoxville (United States)
Dennis Duncan Earl, Oak Ridge National Lab. (United States)
Boyd M. Evans, Oak Ridge National Lab. (United States)
James L. Corbeil, Tennessee Technological Univ. (United States)
Irene Datskou, Environmental Engineering Group, Inc. (United States)

Published in SPIE Proceedings Vol. 4130:
Infrared Technology and Applications XXVI
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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