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Proceedings Paper

Infrared thermal imaging of SiNx membranes
Author(s): Andrea Irace; Giovanni Breglio; Paolo Spirito; Pasqualina M. Sarro
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Paper Abstract

In this paper we present preliminary experimental results of static thermal mapping for the characterization of thermal properties of single or multilayer thin film membranes. Based on direct radiometric measurement, the proposed system is able to acquire, with high spatial (less than 10 micrometers ) and quite good temperature (less than 0.1 degree(s)C) resolution, the temperature maps. The results, reported here, confirm its capability. We tested a low stress LPCVD SiN membrane heated by means of a LPCVD polysilicon (PS) resistor. The experimental results obtained are in qualitative agreement with theoretical previsions.

Paper Details

Date Published: 15 December 2000
PDF: 7 pages
Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); doi: 10.1117/12.409838
Show Author Affiliations
Andrea Irace, Univ. degli Studi di Napoli Federico II (Italy)
Giovanni Breglio, Univ. degli Studi di Napoli Federico II (Italy)
Paolo Spirito, Univ. degli Studi di Napoli Federico II (Italy)
Pasqualina M. Sarro, Delft Univ. of Technology (Netherlands)


Published in SPIE Proceedings Vol. 4130:
Infrared Technology and Applications XXVI
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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