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Proceedings Paper

256 x 290 diffractive microlens array monolithic integration with PtSi focal plane array
Author(s): Yi Li; Taoyuan Hu; Xinjian Yi; Liping Cai; Miao He; Sixiang Chen
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Paper Abstract

256x290 diffractive microlens arrays have been designed by considering the correlative optical and processing parameters for PtSi focal plane array. The microlens arrays were designed to operate at (lambda) equals4micrometers , with a lens size of 50micrometers x33micrometers and the lens speed f/2.1 located on the backside of PtSi focal plane array chip. The diffractive microlens arrays have been fabricated on the backside of PtSi focal plane array chip by successive photolithography and Ar+ ion-beam etching technique. The alignment of microlens arrays with PtSi focal plane array was completed by a backside aligner with IR light source. The practical processes and fabrication method are discussed. The optical characteristics and performance parameters of PtSi FPA with diffractive microlens arrays are presented.

Paper Details

Date Published: 15 December 2000
PDF: 7 pages
Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); doi: 10.1117/12.409835
Show Author Affiliations
Yi Li, Huazhong Univ. of Science and Technology (China)
Taoyuan Hu, Wuhan Municipal Science and Technology Commission (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)
Liping Cai, Huazhong Univ. of Science and Technology (China)
Miao He, Huazhong Univ. of Science and Technology (China)
Sixiang Chen, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 4130:
Infrared Technology and Applications XXVI
Bjorn F. Andresen; Gabor F. Fulop; Marija Strojnik, Editor(s)

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