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Proceedings Paper

Optical and electrochemical properties of sol-gel-deposited tantalum pentoxide thin films
Author(s): Qinyuan Zhang; Jun Shen; Guangming Wu; Bin Zhou; Junxia Lu; S. M. Attia; Zhongsheng Deng; Jue Wang
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Paper Abstract

Sol-gel spin-coating technique was applied to produce tantalum pentoxide thin films. Pseudo-ternary phase diagrams were used to outline the sol-solution stability and the optimal Ta2O5 thin films formation regions of Ta(OC2H5)5-C2H5OH- CH3COOH-H2O system. Forbidden band gap of Ta2O5 thin film was calculated and found to be Eg equals 3.7 ev. Room temperature cyclic voltammetric measurements clearly revealed a protonic conductor behavior for Ta2O5 thin films.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408490
Show Author Affiliations
Qinyuan Zhang, Tongji Univ. (China)
Jun Shen, Tongji Univ. (China)
Guangming Wu, Tongji Univ. (China)
Bin Zhou, Tongji Univ. (China)
Junxia Lu, Tongji Univ. (China)
S. M. Attia, Tongji Univ. (China)
Zhongsheng Deng, Tongji Univ. (China)
Jue Wang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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