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Proceedings Paper

Study of thin film gas sensors using optical methods
Author(s): Zhaosheng Tang; Zhengxiu Fan; Jian-Da Shao
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Paper Abstract

The optical sensitive characteristic of SnO2 and V2O5 thin films to the gas SO2 was investigated with photometric and ellipsometric methods. It is found that thin films of the Pd-doped SnO2 and pure-V2O5 have good optical sensitive characteristics to SO2 in the visible range, and the Zr-doped SnO2 film in the near-infrared area. The results show that the change of the optical characteristic is directly related to the variation of optical gap and the concentration of free carrier in thin films.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408488
Show Author Affiliations
Zhaosheng Tang, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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