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Proceedings Paper

Epitaxial growth and characterization of oxide thin films
Author(s): Guozhen Yang; Huibin Lu; T. Zhao; Fan Chen; Zhenghao Chen
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Paper Abstract

More than ten kinds of oxide thin films and their heterostructure have been successfully fabricated on SrTiO3 (001) substrates by laser molecular beam epitaxy. Measurements of atomic force microscopy, high-resolution transmission electron microscope and x-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect. The enhancement of second-harmonic generation in BaTiO3/SrTiO3 (BTO/STO) superlattices and the thickness dependent structural characteristics of BaTiO3 (BTO) thin films were observed.

Paper Details

Date Published: 29 November 2000
PDF: 5 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408479
Show Author Affiliations
Guozhen Yang, Institute of Physics (China)
Huibin Lu, Institute of Physics (China)
T. Zhao, Institute of Physics (China)
Fan Chen, Institute of Physics (China)
Zhenghao Chen, Institute of Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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