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Proceedings Paper

Tungsten thin films deposition on tool steel substrates
Author(s): Qixin Guo; Mitsuhiro Nishio; Hiroshi Ogawa
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Paper Abstract

Thin films of tungsten used as buffer layers for diamond coating on tool steels have been prepared by rf magnetron sputtering. The tungsten deposition rates as functions of argon pressure and rf input power are reported. The effects of argon pressure and rf input power on the film structures have also been studied. Finally, it has been demonstrated that continuous diamond films can be grown on tool steels by using tungsten films as buffer layers.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408473
Show Author Affiliations
Qixin Guo, Saga Univ. (Japan)
Mitsuhiro Nishio, Saga Univ. (Japan)
Hiroshi Ogawa, Saga Univ. (Japan)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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