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Proceedings Paper

RFTIR measurement on backside-thinned detector film of InSb infrared focal plane arrays
Author(s): Bo-Liang Chen; Hua Yang; Xiaoning Hu; Juncao Lin
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Paper Abstract

Reflection Fourier transform infrared (RFTIR) measurements were performed on backside-illuminated InSb infrared focal plane arrays for thinning process monitoring. InSb detector film thickness and its variation across the film can be measured from the RFTIR spectra taken by this contactless and non-destructive technique.

Paper Details

Date Published: 29 November 2000
PDF: 3 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408419
Show Author Affiliations
Bo-Liang Chen, Shanghai Institute of Technical Physics (China)
Hua Yang, Shanghai Institute of Technical Physics (China)
Xiaoning Hu, Shanghai Institute of Technical Physics (China)
Juncao Lin, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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