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Proceedings Paper

Wavelength tuning of GaAs/AlGaAs quantum well infrared photodetectors by rapid thermal annealing and proton implantation
Author(s): Ning Li; Xingquan Liu; Na Li; Wei Lu; Xianzhang Yuan; Shuechu Shen; Hark Hoe Tan; L. Fu; Chennupati Jagadish
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Paper Abstract

Due to the mature material growth and device fabrication technology, GaAs/AlxGa1-xAs quantum-well infrared photodetector (QWIP) has been extensively studied and used in remote sensing, particularly in long wavelength range, e.g. the atmospheric window region of 8 approximately 14 micrometers . This paper reports the using of intermixing techniques to modify GaAs/AlGaAs multiple quantum well photodetectors (QWIPs). A red shift in response wavelength of QWIP has been obtained both by rapid thermal annealing (RTA) and proton implantation. The peak response wavelengths has been shifted into the atmospheric window (8.3 micrometers ) from the originally 7.7 micrometers . The response spectra have been measured as the function of the different temperature of the RTA and the ion doses in the range from 4 X 1014 to 5 X 1015 cm-3, respectively. The device performance such as dark current and blackbody response are also measured at different conditions. The effect of RTA and ion implantation on the device performance has been interpreted theoretically by the interdiffusion of Al atoms across the GaAs/AlxGa1-xAs heterointerfaces.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408418
Show Author Affiliations
Ning Li, Shanghai Institute of Technical Physics (China)
Xingquan Liu, Shanghai Institute of Technical Physics (China)
Na Li, Shanghai Institute of Technical Physics (China)
Wei Lu, Shanghai Institute of Technical Physics (China)
Xianzhang Yuan, Shanghai Institute of Technical Physics (China)
Shuechu Shen, Shanghai Institute of Technical Physics (China)
Hark Hoe Tan, Australian National Univ. (Australia)
L. Fu, Australian National Univ. (Australia)
Chennupati Jagadish, Australian National Univ. (Australia)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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