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Proceedings Paper

Planar photonic device using surface thin film stressors
Author(s): W.-X. Chen; Q. J. Xing; L. S. Yu; Qizhi Z. Liu; Paul K. L. Yu; S. S. Lau
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Paper Abstract

Employing photoelastic effect with thermally stable and controllable metal stressor stripes for low propagation loss (on the order of 1 dB/cm) optical waveguide has been achieved in both InP and GaAs based planar waveguides. The study of stressors is based on Ni and WNi stripes. Planar processes, involving both photoelastic WNi stressor and He- implantation, have been used in the fabrication of single- quantum-well photoelastic GaAs/AlGaAs lasers and of the InGaAsP/InP Franz-Keldysh effect electroabsorption waveguide modulators. Get high performance photoelastic semiconductor laser and electroabsorption modulator.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408417
Show Author Affiliations
W.-X. Chen, Peking Univ. (China)
Q. J. Xing, Peking Univ. (China)
L. S. Yu, Peking Univ. (China)
Qizhi Z. Liu, Univ. of California/San Diego (United States)
Paul K. L. Yu, Univ. of California/San Diego (United States)
S. S. Lau, Univ. of California/San Diego (United States)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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