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Proceedings Paper

Surface texturing of crystalline silicon and effective area measurement
Author(s): Tietun Sun; Dong Chen; Rongqiang Chui
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Paper Abstract

In this paper, the surface area of solar cell is determined by the capacitance measurements of MOS structure. The texture etching technology can be controlled according to the change of silicon surface area, furthermore, the textured silicon surface and interface characteristic of solar cell can be studied by measuring the relationship of capacitance and voltage for MOS structure.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408408
Show Author Affiliations
Tietun Sun, Shanghai Jiao Tong Univ. (China)
Dong Chen, Shanghai Jiao Tong Univ. (China)
Rongqiang Chui, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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