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Proceedings Paper

Measuring rotating substrate temperature by laser
Author(s): Siyuan Lu; Xiufang Ma; Yuanhua Shen
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Paper Abstract

Temperature measurement by laser, which has the advantage of accuracy, rapidity and non-touching is suitable for measuring the temperature of substrate in vacuum coating plant. But till now this method was limited to measuring the stationary substrate, which couldn't meet the need of practical coating process because substrate rotating is essential for the uniformity of heating and coating. Since the thickness of the laser incident point changes with the rotating of the substrate, the interference fringe movement either caused by this reason or by temperature increment can't be distinguished. Recently we developed an automatic measuring system being able to measure the temperature of a rotating substrate. The installment of a micro-switch on the stationary frame and a projection on the turntable enables the computer to count the movement of interference fringes when and only when the substrate turns to an identical position. This development makes the method more useful in practical coating process. The design for the system is outlined, the measuring process is detailed, and an example of temperature measurement is presented.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408402
Show Author Affiliations
Siyuan Lu, Fudan Univ. (China)
Xiufang Ma, Fudan Univ. (China)
Yuanhua Shen, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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