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Proceedings Paper

Microfabrication process study for stator winding of electromagnetic micromotor
Author(s): Xiaolin Zhao; Bingchu Cai; Chunsheng Yang; Chen Zhang
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Paper Abstract

The micro-fabrication process for electromagnetic micro- motor stator winding, including adopting of new insulating material such as polyimide, is discussed in present study. A diameter of 2 mm electromagnetic micro-motor after adopting the new micro-fabrication process improves its performance. The motor output torque is 25% higher than before, and the operating temperature can reach 180 degree(s)C. Two examples of practical usage of micro-motor made by new process are given.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408401
Show Author Affiliations
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)
Chunsheng Yang, Shanghai Jiao Tong Univ. (China)
Chen Zhang, Shanghai Jiao Tong Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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