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Proceedings Paper

Properties of gallium phosphide films prepared by rf magnetron sputtering
Author(s): Jianquan Song; Zhengtang Liu; Dagang Guo; Zhongqi Yu; Dongsheng Geng; Xiulin Zheng
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Paper Abstract

As a coating material with excellent durability in 8 - 12 micrometers waveband, GaP films can be used as anti-reflective and protective layers on the windows and domes of ZnS, ZnSe and Ge. In this paper GaP films have been deposited by radio frequency magnetron sputtering of single crystalline gallium phosphide. The deposition rate, composition, structure, hardness and optical properties of GaP films have been investigated, and it's application used as anti-reflective and protective films on ZnS substrate has also been studied.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408399
Show Author Affiliations
Jianquan Song, Northwestern Polytechnical Univ. (China)
Zhengtang Liu, Northwestern Polytechnical Univ. (China)
Dagang Guo, Northwestern Polytechnical Univ. (China)
Zhongqi Yu, Northwestern Polytechnical Univ. (China)
Dongsheng Geng, Northwestern Polytechnical Univ. (China)
Xiulin Zheng, Northwestern Polytechnical Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications

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