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Proceedings Paper

Influence of some physical parameters on sol-gel-derived TiO2 thin films
Author(s): S. M. Attia; Jue Wang; Jun Shen; Guangming Wu; Qinyuan Zhang; Zhenquan Lai; Tianhe Yang
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Paper Abstract

We present some physical parameters that affect the deposition of TiO2 films by the sol-gel method. A set of solutions with different TiO2 concentrations has been prepared. After synthesis of a set of TiO2 films by spin coating at different spinning speeds, the films were annealed at different temperatures. The viscosities of the start solutions were measured by a viscometer. The thickness of the films and their refractive index were measured by a monochromatic ellipsometer. The results showed that the thickness is decreasing exponentially with increasing spinning speed and decreasing linearly with temperature according to the relation d(nm) equals 104 - 0.125 T( degree(s)C) + 322e-S/900. The thickness of the films ranges from 56 to 129 nm. The refractive index is decreasing with the spinning speed and increasing with the temperature according to the relation n equals 1.791 + 6.107X10-4T( degree(s)C) + 1.733e-S/600. The refractive index of the prepared films ranges from 1.89 to 2.125 depending on annealing temperature and spinning speed. The viscosity of the start solutions increased with increasing the TiO2 concentration and the aging time. One week, after preparing the solutions the viscosity was found to be in the range of 1.4 to 4.4 mPa.s depending on the concentrations.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408389
Show Author Affiliations
S. M. Attia, Tongji Univ. and Univ. of Kafer El Sheikh (China)
Jue Wang, Tongji Univ. (China)
Jun Shen, Tongji Univ. (China)
Guangming Wu, Tongji Univ. (China)
Qinyuan Zhang, Tongji Univ. (China)
Zhenquan Lai, Tongji Univ. (China)
Tianhe Yang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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