Share Email Print
cover

Proceedings Paper

Thickness monitoring method of infrared optical thin film irregular coatings
Author(s): Minfeng Hu; Furong Zhu; Fengshan Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A kind of method proposed in dealing with irregular coatings during optical thickness automatic monitoring of coating process in this paper, and accordingly appropriate program algorithm is also listed here, comparison results between theoretical calculation and this application indicates its efficiency and utility.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408383
Show Author Affiliations
Minfeng Hu, Shanghai Institute of Technical Physics (China)
Furong Zhu, Shanghai Institute of Technical Physics (China)
Fengshan Zhang, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

© SPIE. Terms of Use
Back to Top