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Proceedings Paper

Polarization properties of AlN single crystalline film
Author(s): Yifang Yuan; Baoxue Chen; Shaofeng Qiu; Lin Chen
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Paper Abstract

An aluminum nitride single crystalline film on sapphire substrate was prepared by metal-organic chemical-vapor deposition. The method of waveguide measurement was employed for studying polarization properties of the single crystalline film. The theoretical analysis of polarization properties of the film and the optical properties of the TE and TM modes obtained from experimental results are given. It is first time to study on polarization properties of AlN single crystalline film.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408378
Show Author Affiliations
Yifang Yuan, Univ. of Shanghai for Science and Technology (China)
Baoxue Chen, Univ. of Shanghai for Science and Technology (China)
Shaofeng Qiu, Univ. of Shanghai for Science and Technology (China)
Lin Chen, Shanghai Second Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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