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Proceedings Paper

Influence of top electrode of PZT capacitor on ferroelectric properties
Author(s): Pingsun Qiu; Aili Ding; Xiyun He; Weigen Luo
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Paper Abstract

PZT thin films were prepared by a modified sol-gel technique. Au was used as a top electrode of PZT capacitor. An influence of the process of the top electrode on the PZT ferroelectric capacitor was investigated. The relationship between remnant polarization, coercive electric field and the conditions of thermal treatment for the top Au electrode was discussed. The diffusion of Au and the interface between PZT and Au were analyzed by Auger spectra too. The proper heat treatment condition for optimal ferroelectric performance in the PZT capacitor was suggested.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408356
Show Author Affiliations
Pingsun Qiu, Shanghai Institute of Ceramics (China)
Aili Ding, Shanghai Institute of Ceramics (China)
Xiyun He, Shanghai Institute of Ceramics (China)
Weigen Luo, Shanghai Institute of Ceramics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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