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Proceedings Paper

Effect of PbO-coated layer on the microstructure and electrical properties of sol-gel-derived PZT thin films
Author(s): Jinglan Sun; Xiangjian Meng; L. X. Bo; Zhixun Ma; Zhiming Huang; Shaoling Guo; Junhao Chu
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Paper Abstract

Highly (100)-oriented lead zirconate titanate Pb(Zr0.52Ti0.48)O3 thin films with and without a PbO- coated layer were prepared on LaNiO3 (LNO)-coated silicon substrates by a simple sol-gel process. X-ray diffraction and atomic force microscope were applied to study the microstructure of the films. The ferroelectric and fatigue properties were measured by a RT66A system. An infrared spectroscopic ellipsometer was used to determine the thickness of the thin films. The leakage current density (J-t) was carried out with a Keithley 617 programmable electrometer. All measurements were conducted on a Pt-PZT- LNO capacitor structure. It was observed that the PbO-coated layer has no effect on the texture of the PZT thin films while it leads to a great improvement in the surface morphology. The results indicated that samples with a PbO- coated layer show higher remnant polarization and lower coercive field (18.6 (mu) C/cm2 and 58.5 kV/cm) than that of samples without PbO-coated layer. After 108 switching cycles, the net-switched polarization for the film with a PbO-coated layer does not show any drop.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408355
Show Author Affiliations
Jinglan Sun, Shanghai Institute of Technical Physics (China)
Xiangjian Meng, Shanghai Institute of Technical Physics (China)
L. X. Bo, Shanghai Institute of Technical Physics (China)
Zhixun Ma, Shanghai Institute of Technical Physics (China)
Zhiming Huang, Shanghai Institute of Technical Physics (China)
Shaoling Guo, Shanghai Institute of Technical Physics (China)
Junhao Chu, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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