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Proceedings Paper

Characterization of smart PZT/NiTi heterostructure and membrane actuators
Author(s): Jinrong Cheng; Dong Xu; Zhongyan Meng
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Paper Abstract

Combining sol-gel and Rf magnetron sputtering techniques, the smart PZT/NiTi/Ti/SiO2/Si and PZT/Pt/Ti/SiO2/Si heterostructures were prepared. Based on these material systems, two types of membrane actuators were designed and fabricated by using semiconductor micro-fabrication techniques. The 0.4 micrometers thick PZT thin films were used as actuator components, which were driven by sinusoidal or triangular wave current with different frequency. A single laser interference system was used to examine dynamic displacements. Compared with the PZT/Pt/Ti/SiO2/Si, the PZT/NiTi/Ti/SiO2/Si membrane actuators revealed more complexes and larger dynamic displacement. The highest deflect displacement of PZT/NiTi/Ti/SiO2/Si and PZT/Pt/Ti/SiO2/Si actuators occurred at the resonance frequency of 21.11 and 33.6 kHz respectively.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408350
Show Author Affiliations
Jinrong Cheng, Shanghai Univ. (China)
Dong Xu, Shanghai Jiao Tong Univ. (China)
Zhongyan Meng, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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