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Proceedings Paper

Infrared optical properties of PbZrxTi1-xO3 thin films
Author(s): Zhiming Huang; Chunping Jiang; Pingxiong Yang; Zhanhong Zhang; Junhao Chu
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Paper Abstract

Lead zirconate titanate PbZrxTi1-xO3 (PZT) thin films grown on Pt/Ti/SiO2/Si substrates with x equals 0.3 and 0.5 have been measured by infrared spectroscopic ellipsometry (IRSE). The IRSE data measured at an angle of incidence 75 degree(s) for x equals 0.3 and 70 degree(s) for x equals 0.5 are fitted by a proposed dielectric function formula. The refractive index and extinction coefficient of PZT with x equals 0.3 and 0.5 are determined in the spectral range of 2.5 - 12.5 micrometers . As the wavelength increases, the refractive index decreases, on the contrary, the extinction coefficient increases. The absorption coefficient for x equals 0.5 is greater about 1.5 times than that for x equals 0.3. The effective static charges of PZT is also derived by fitting the IRSE data. The values obtained are 1.792 +/- 0.031 and 1.838 +/- 0.0465 for PZT with x equals 0.3 and 0.5, respectively. The results reveal that charge transfer is not complete in PbZrxTi1-xO3 thin films.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408346
Show Author Affiliations
Zhiming Huang, Shanghai Institute of Technical Physics (China)
Chunping Jiang, Shanghai Institute of Technical Physics (China)
Pingxiong Yang, Shanghai Institute of Technical Physics (China)
Zhanhong Zhang, Shanghai Institute of Technical Physics (China)
Junhao Chu, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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