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Proceedings Paper

Low-temperature preparation of BaTiO3 thin film by MOD and hydrothermal treatment
Author(s): Zhiqiang Wei; Huaping Xu; Kaoru Yamashita; Masanori Okuyama
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Paper Abstract

BaTiO3 (BTO) thin films with perovskite structure have been prepared on Ti/Pt/Ti/SiO2/Si substrate using a combined process of conventional MOD process and hydrothermal method. BTO thin films with polycrystalline structure are obtained on silicon at low processing temperatures lower than 200 degree(s)C. The film thickness ranged from 0.20 to 0.84 micrometers . The structural and ferroelectric properties were investigated as a function of film thickness by x-ray diffraction, scanning electron microscopy, Raman spectroscopy and ferroelectric test system. The film retains the tetragonal perovskite structure with the (100) preferred orientation perpendicular to the film surface independent of film thickness. With increasing of thickness, polarization and coercive field of BaTiO3 thin films increased and shown the same trends.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408342
Show Author Affiliations
Zhiqiang Wei, Osaka Univ. (Japan)
Huaping Xu, Osaka Univ. (Japan)
Kaoru Yamashita, Osaka Univ. (Japan)
Masanori Okuyama, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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