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Proceedings Paper

Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films
Author(s): Tianjin Zhang; Hong Ni
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Paper Abstract

The effects of the different bottom electrodes on the electrical properties of BST thin films have been investigated. The electrical properties of BST films spin- coated on Pt/RuO2 hybrid electrodes were improved compared to the films on RuO2 electrodes. The dielectric constant and dissipation factor of the 0.1 micrometers BST thin films on Pt/RuO2 bottom electrodes were 582 and 0.035 at zero bias voltage. The leakage current density of this film was 7.2 X 10-8 A/cm2 at 1.5 V which was about one order of magnitude lower than leakage current density (5.2 X 10-7 A/cm2 at 1.5 V) of BST capacitor with RuO2 films.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408340
Show Author Affiliations
Tianjin Zhang, Hubei Univ. (China)
Hong Ni, Hubei Univ. (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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