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Proceedings Paper

Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO3 thin films
Author(s): Huyong Tian; Weigen Luo; Xinghua Pu; Pingsun Qiu; Xiyun He; Aili Ding
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Paper Abstract

A modified sol-gel process with acetate based precursor solutions for Sr-doped barium titanate thin films is presented. A four-step heating procedure was employed to prepare the Ba0.8Sr0.2TiO3 thin films. The thermal decomposition and crystallization temperatures of the precursors were determined by means of FTIR, TGA/DTA, and XRD measurements. The nonlinear C-V characteristics are due to strong depletion that can not originate from the BST/electrode interface, but must come internally from the BST films.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408338
Show Author Affiliations
Huyong Tian, Shanghai Institute of Ceramics (South Korea)
Weigen Luo, Shanghai Institute of Ceramics (China)
Xinghua Pu, Shanghai Institute of Ceramics (China)
Pingsun Qiu, Shanghai Institute of Ceramics (China)
Xiyun He, Shanghai Institute of Ceramics (China)
Aili Ding, Shanghai Institute of Ceramics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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