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Proceedings Paper

Fabrication of multielement arrays based on high-Tc superconducting microbolometers
Author(s): Xintian Liu; Z. H. Liu; Yong Chang; Junhao Chu
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Paper Abstract

The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D* for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.

Paper Details

Date Published: 29 November 2000
PDF: 3 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408315
Show Author Affiliations
Xintian Liu, Shanghai Institute of Technical Physics (China)
Z. H. Liu, Shanghai Institute of Technical Physics (China)
Yong Chang, Shanghai Institute of Technical Physics (United States)
Junhao Chu, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications

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