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Proceedings Paper

New way of preparing ion barrier ultrathin film without pollution
Author(s): Qingduo Duanmu; Delong Jiang; Yaohua Lu; Ye Li; Lichen Fu; Jingquan Tian
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Paper Abstract

A new technology and method preparing ions barrier film on the input face of multi-hole substratum, MCP, without carbon pollution were studied and introduced in this paper. The composition of the film and the performance of MCP coated with ion barrier film were tested by XPS and UV photoelectric emission method. The new process made the carbon content largely decrease in the film, and the characteristics of MCP unmodified.

Paper Details

Date Published: 29 November 2000
PDF: 3 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408290
Show Author Affiliations
Qingduo Duanmu, Changchun Institute of Optics and Fine Mechanics (China)
Delong Jiang, Changchun Institute of Optics and Fine Mechanics (China)
Yaohua Lu, Changchun Institute of Optics and Fine Mechanics (China)
Ye Li, Changchun Institute of Optics and Fine Mechanics (China)
Lichen Fu, Changchun Institute of Optics and Fine Mechanics (China)
Jingquan Tian, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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