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Proceedings Paper

Development of 65 X 1 uncooled membrane-type microbolometer array
Author(s): V. G. Malyarov; Igor A. Khrebtov; A. D. Smirnov; L. S. Raguzina; V. Yu. Zerov; Yu. V. Kulikov; Igor I. Shaganov
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Paper Abstract

This paper presents the structure and technology of 65- elements linear array of membrane type microbolometers, and the research results of its properties. DC biased microbolometers with VOx thermosensitive layer have detectivity of 5x107 cm/Hz1/2W at 12.5 Hz at 12.5 Hz frequency, and response time of 3 ms. The ways of improvement of developed linear array sensitivity are planed.

Paper Details

Date Published: 28 November 2000
PDF: 6 pages
Proc. SPIE 4340, 16th International Conference on Photoelectronics and Night Vision Devices, (28 November 2000); doi: 10.1117/12.407759
Show Author Affiliations
V. G. Malyarov, S.I. Vavilov State Optical Institute (Russia)
Igor A. Khrebtov, S.I. Vavilov State Optical Institute (Russia)
A. D. Smirnov, Svetlana-Electronpribor Co. (Russia)
L. S. Raguzina, Svetlana-Electronpribor Co. (Russia)
V. Yu. Zerov, S.I. Vavilov State Optical Institute (Russia)
Yu. V. Kulikov, S.I. Vavilov State Optical Institute (Russia)
Igor I. Shaganov, S.I. Vavilov State Optical Institute (Russia)


Published in SPIE Proceedings Vol. 4340:
16th International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachev; Alexander I. Dirochka, Editor(s)

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