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Proceedings Paper

Micro-electro-mechanical systems spatial light modulator development
Author(s): Scot S. Olivier; Paul A. Bierden; Thomas G. Bifano; David J. Bishop; Emily Carr; William D. Cowan; Matthew Richard Hart; Michael A. Helmbrecht; Peter A. Krulevitch; Richard S. Muller; Bernard Sadoulet; Olav Solgaard; J. Yu
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Paper Abstract

The NSF Center for Adaptive Optics (CfAO) is coordinating a five to ten year program for the development of MEMS-based spatial light modulators suitable for adaptive optics applications. Participants in this multi-disciplinary program include several partner institutions and research collaborators. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications and would benefit from low device cost, small system size, and low power requirements. We present an overview of the CfAO MEMS development plan along with details of the current program status. Piston mirror array devices that satisfy minimum application requirements have been developed, and work is continuing to enhance the piston devices, add tip-tilt functionality, extend actuator stroke, create a large array addressing platform, and develop new coating processes.

Paper Details

Date Published: 22 November 2000
PDF: 6 pages
Proc. SPIE 4124, High-Resolution Wavefront Control: Methods, Devices, and Applications II, (22 November 2000); doi: 10.1117/12.407513
Show Author Affiliations
Scot S. Olivier, Lawrence Livermore National Lab. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)
Thomas G. Bifano, Boston Univ. (United States)
David J. Bishop, Lucent Technologies (United States)
Emily Carr, Lawrence Livermore National Lab. and Univ. of California/Davis (United States)
William D. Cowan, Air Force Research Lab. (United States)
Matthew Richard Hart, Univ. of California/Berkeley (United States)
Michael A. Helmbrecht, Univ. of California/Berkeley (United States)
Peter A. Krulevitch, Lawrence Livermore National Lab. (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)
Bernard Sadoulet, Univ. of California/Berkeley (United States)
Olav Solgaard, Stanford Univ. (United States)
J. Yu, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 4124:
High-Resolution Wavefront Control: Methods, Devices, and Applications II
John D. Gonglewski; Mikhail A. Vorontsov; Mark T. Gruneisen, Editor(s)

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