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Proceedings Paper

Science and engineering in laser surface cleaning
Author(s): Yongfeng Lu; Wen Dong Song; Minghui Hong; ZhongMin Ren; Yuan Wei Zheng
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Paper Abstract

Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. The laser-induced removal of film-type contaminants from IC (Integrated Circuit) packages, IC mould, Printed Circuit Board and flexible circuit was studied. The cleaning models were established for removal of particles from substrate surfaces without and with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser-induced removal of particles from magnetic sliders and disk surfaces was investigated. Monitoring of laser cleaning by acoustic wave, electric field signal and particle counter was also addressed.

Paper Details

Date Published: 16 August 2000
PDF: 12 pages
Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); doi: 10.1117/12.407352
Show Author Affiliations
Yongfeng Lu, National Univ. of Singapore (Singapore)
Wen Dong Song, National Univ. of Singapore (Singapore)
Minghui Hong, National Univ. of Singapore (Singapore)
ZhongMin Ren, National Univ. of Singapore (Singapore)
Yuan Wei Zheng, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4065:
High-Power Laser Ablation III
Claude R. Phipps, Editor(s)

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