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Proceedings Paper

New material processing of AIN ceramic with femtosecond, nanosecond, and microsecond laser ablation
Author(s): Hiroyuki Yabe; Yoichi Hirayama; Minoru Obara
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Paper Abstract

In this study, the new material processing characteristic of aluminum nitride (AlN) ceramic is compared with microsecond, nanosecond and femtosecond laser ablation. The conventional laser material processing technology with longer pulsewidth laser such as TEA CO2 laser, Q-switched YAG laser, and excimer lasers leads to the thermal shock or lateral damage on target material, and those thermal effect causes the surface modification of AlN ceramic target. The comparative study of the laser ablation with microsecond TEA CO2 laser pulse, nanosecond KrF excimer laser pulse, and femtosecond Ti:sapphire laser pulse is performed in time domain.

Paper Details

Date Published: 16 August 2000
PDF: 8 pages
Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); doi: 10.1117/12.407315
Show Author Affiliations
Hiroyuki Yabe, Keio Univ. (Japan)
Yoichi Hirayama, Keio Univ. (Japan)
Minoru Obara, Keio Univ. (Japan)


Published in SPIE Proceedings Vol. 4065:
High-Power Laser Ablation III
Claude R. Phipps, Editor(s)

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