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Proceedings Paper

High-resolution soft x-ray microscopy
Author(s): Weilun Chao; Erik H. Anderson; Gregory Denbeaux; Bruce D. Harteneck; Mark A. LeGros; Angelic L. Pearson; Deirdre L. Olynick; David T. Attwood
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Paper Abstract

The XM-1 is a soft x-ray full-field microscope that uses zone plates for the condenser and objective lenses. One of the main features of XM-1 is the high spatial resolution, which is made possible by the fine features of the objective zone plate. At present, the microscope uses a zone plate with an outer zone width of 25 nm. Several test patterns containing periodic lines and spaces were fabricated to measure the resolution of the microscope. Experimental data shows that the microscope can resolved 25 nm features. As simulations indicate that good contrast can be observed with even smaller features, test patterns with finer features are being fabricated to actually determine the resolution limit of the microscope.

Paper Details

Date Published: 8 November 2000
PDF: 5 pages
Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); doi: 10.1117/12.406671
Show Author Affiliations
Weilun Chao, Lawrence Berkeley National Lab. (USA) and Univ. of California/Berkeley (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Gregory Denbeaux, Lawrence Berkeley National Lab. (United States)
Bruce D. Harteneck, Lawrence Berkeley National Lab. (United States)
Mark A. LeGros, Lawrence Berkeley National Lab. (United States)
Angelic L. Pearson, Lawrence Berkeley National Lab. (United States)
Deirdre L. Olynick, Lawrence Berkeley National Lab. (United States)
David T. Attwood, Lawrence Berkeley National Lab. (USA) and Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 4146:
Soft X-Ray and EUV Imaging Systems
Winfried M. Kaiser; Richard H. Stulen, Editor(s)

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