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Proceedings Paper

High-precision measurements of the groove density of diffraction gratings
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Paper Abstract

The diffraction gratings are widely used to monochromatize and even focus the soft X-ray radiation produced by the high brilliance third generation synchrotron radiation sources. Nevertheless, the final performance of an instrument that uses a diffraction grating is sensitive to any figure error and to any undesired groove density variation along the surface of the grating itself. Therefore, typical requirements are 0.1 - 0.2 arcsec (even less) on the residual slope errors (after proper shape subtraction), while the groove density is required to be constant along the surface with a percentage error below 0.1%. Vice-versa, sometimes groove density variation is required along the surface to correct spherical aberrations or to change the focal properties of a grating. Since the gratings, in the soft X-ray region, work in grazing incidence mode, the ideal instrument to measure it is a mono-dimensional profilometer. At ELETTRA, the Italian third generation synchrotron radiation source, we have an in house modified version of the Long Trace Profiler.

Paper Details

Date Published: 8 November 2000
PDF: 8 pages
Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); doi: 10.1117/12.406666
Show Author Affiliations
Daniele Cocco, Sincrotrone Trieste (Italy)
Rudi Sergo, Sincrotrone Trieste (Italy)
Giovanni Sostero, Sincrotrone Trieste (Italy)
Marco Zangrando, Lab. Nazionale de Tecnologie Avanzate Superfici e Catalisi/INFM (Italy)

Published in SPIE Proceedings Vol. 4146:
Soft X-Ray and EUV Imaging Systems
Winfried M. Kaiser; Richard H. Stulen, Editor(s)

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